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Based on STM advanced proprietary technologies, ST's MEMS address the most innovative features required on the market, ranging from mobile and consumer applications to the innovative needs of the healthcare and automotive markets.
Housed in ultra-compact packages, MEMS achieve a high level of motion-control detection, embedding the most useful smart functions and minimizing the power consumption.

Software for MEMS
List of low level drivers (generic or Linux) are also available
LIS3DH is an ultra low-power high three-axis linear accelerometer STEVAL-MKI105V1
LIS3DSH is an ultra low-power high performance three-axis linear accelerometer belonging to the nano family with embedded state machine
AIS328DQ is automotive-qualified low-g accelerometer offers excellent stability
How to evaluate the resolution of an accelerometer

Come valutare la risoluzione di un accelerometro
Pressure Sensor
Digital Compasses
Application Guidelines for MEMS Compass
    The purpose of these Marketing Packages is to provide application guidelines and technical knowledge to ST technical
    community (FAE & Sales) on LSM303D (Ultra compact high performance e-compass: 3D accelerometer and 3D
    magnetometer module).
Touchscreen Controllers
Eval Boards
MEMS Eva Board
All Eval Boards
iNEMO inertial modules family
iNEMO eva boards
iNEMO M1 eva board
SW and HW solutions
iNEMO - LSM9DS0 is inertial module 3D accelerometer, 3D gyroscope, 3D magnetometer is now in Mass Production.
Availability for Mass Market is 14Q1 (but STM can sample now depending on customer planning; for more information)
Technical Notes on package surface mounting
Application Notes on MEMS
Technical note
EDN - The embedded self-test feature in MEMS inertial sensors is here.
How implantable pulse generators are stimulating the medical industry is here.
Mems news - June 2013 - is here

    PRODUCTS FOCUS for New Designs in Q2 2013

Mems presentation is here


MEMS sensors home page is here
MEMS Evaluation Boards are here
MEMS Accelerometers are here
MEMS e-Compasses are here
MEMS Microphones (audio sensor omnidirectional digital microphone) are here

MEMS Pressure sensors are here
MEMS Touchscreen Controllers are here



The accelerometers home page is here.

How to evaluate the resolution of an accelerometer is here
Come valutare la risoluzione di un accelerometro qui


3 axes Ultra Low Power Accelerometer 

The DIL24 adapter is:  STEVAL-MKI105V1

is an ultra low-power high performance three-axis linear accelerometer belonging to the nano family with 

embedded state machine that can be programmed to implement autonomous applications.
Application Guidelines for LIS3DSH State Machine is here.
The purpose of these Marketing Packages is to provide application guidelines and technical  knowledge to ST technical community (FAE & Sales)  on LIS3DSH (ultra low-power high performance 3- axes nano accelerometer) state machine
  • Educational part: What is state machine? 
  • Applications of state machine
  • LIS3DSH: Overview of the State Machine  
  • Development of State programs:  Unico GUI 
  • SW, Examples
  • Documentation & Support Tools


is a 3-axis accelerometer in a new 2x2, 12 leads package; Characteristics of LIS2DH12 are equivalent to the well-known LIS2DH, LIS2DH12 share the same pinout than LSM303C
The doc is here.

is new automotive-qualified low-g accelerometer offers excellent stability, it is here.
The AIS328DQ is an ultra low-power high performance three axis linear accelerometer with a digital serial interface SPI standard output.
An I2C compatible interface is also available.
The device features ultra low-power operational modes that allow advanced power saving and smart sleep-to-wakeup functions. The AIS328DQ has dynamic user-selectable full-scales of 2g/4g/8g and it is capable of measuring accelerations with output data rates from 0.5 Hz to 1 kHz.
The self-test capability allows the user to check the functioning of the sensor in the final application.
The device may be configured to generate an interrupt signal through inertial wakeup/free-fall events, or by the position of the device itself.
Thresholds and timing of interrupt generators are programmable by the end user on-the-fly. Available in small Quad Flat Pack no-lead package (QFPN) with a 4x4 mm footprint, the AIS328DQ is able to respond to the trend towards application miniaturization, and is guaranteed to operate over a temperature range from -40 C to +105 C.


MEMS audio sensor omnidirectional digital microphone

MEMS microphones target all audio applications where small size, high sound quality, reliability and affordability are key requirements. Based on Omron’s sensor technology, our microphones meet price points set by the traditional electret condenser microphones (ECM), while featuring superior reliability and robustness.

  • STMs new Virtual Laboratory for your audio and MEMS microphone is here. The brochure is here.
  • The microphone page is here.


MEMS eva-board

MEMS Evaluation boards are here

If you need test the MP45DT02 (microphone), LIS302DL (ultra compact low-power three-axis linear accelerometer), in conjuntion to the STM32F407VGT6 (Cortex M4), use STM32F4-Discovery.


The STEVAL-MKI109V2 is a motherboard designed to provide users with a complete, ready-to-use platform for the evaluation of STMicroelectronics’ MEMS products.
The board features a DIL24 socket to mount all available adapters for both digital and analog output MEMS devices.
The motherboard includes a high-performance 32-bit microcontroller, which functions as a bridge between the sensor and a PC, on which it is possible to use the downloadable graphical user interface (GUI), or dedicated software routines for customized applications.

For UpDate the firmware on the STEVAL-MKI109V1/2 and for a brief explanation concerning the way to use the UNICO SW see here.


Old Eva-Board:

STEVAL-IFS001V1 (not for new projects)



Features and Description
  • Two power supply options: power connector, USB connector
  • STM32F103RE: high-density performance line ARM-based 32-bit MCU with 256 to 512 KB Flash, USB, CAN, 11 timers, 3 ADCs and 13 communication interfaces
  • LPR430AL: 2-axis gyro (roll, pitch) 300/s full scale with analog output and optional additional filters
  • LY330ALH: yaw-axis gyro 300/s full scale with analog output and optional additional filters
  • LSM303DLH: 6-axis geomagnetic module: 2 g / 4 g / 8 g linear acceleration full scale, magnetic field configurable full scale 1.3 to 8.1 gauss, I2C digital output
  • LPS001DL: pressure sensor 300-1100 mbar absolute full scale with I2C digital output and barometer
  • STLM75: temperature sensor with –55 to +125C range and I2C digital interface
  • Extended connector for wireless connectivity
  • MicroSD™ card slot
  • COM connector with RTS and CTS signals
  • USB 2.0 full speed connection
  • Reset button
  • User LED and button
  • RoHS compliant

  • --

    • The INEMO-M1 is the smallest 9-axis system-on-board (SoB) of the iNEMO module family.
      It integrates multiple ST sensors with a powerful computational core: a 6-axis geomagnetic module, a 3-axis gyroscope and an ARM Cortex™ M3 32-bit MCU.
      This 9-DoF inertial system represents a fully integrated solution that can be used in numerous applications such as virtual reality, augmented reality, image stabilization, human machine interfaces, robotics and inertial body tracking.
      A complete set of communication interfaces in a very small size form factor (13x13x2 mm) make the INEMO-M1 system-on-board a flexible solution for effortless orientation estimation in embedded applications.


  • -
    iNEMO inertial modules family is here.

    iNEMO inertial modules integrate different types of sensors to offer more compact, robust and easy-to-assemble solutions compared to discrete MEMS products.
    iNEMO inertial modules deliver more accurate and reliable sensor performance combined with a reduction of the footprint by up to 85%, depending on the solution selected.

SW and HW solutions
  • iNEMO sensor fusionisan advanced filtering and predictive software that uses sophisticated algorithms to integrate outputs from multiple MEMS sensors.
    2 libraries called LITE and PRO are available for 9-axis (3A+3M+3G):        
  • LITE library usable as example and for demonstration.
    To get the library, provide project details; email SILICA (FAE) or STM for your request.
  • iNEMO Engine Lite - iNEMO Engine_LI3 sorce code
    The iNEMO engine is a new, advanced software engine that fuses accelerometer, gyroscope and magnetometer data to deliver accurate and reliable motion-sensing information that is easy to integrate into smart consumer devices.
    The iNEMO Engine_LI3 Sensor Fusion demonstration firmware comes with the iNEMO Engine.
    The library is available from version 2.3.0 of the STEVAL-MKI062V2 iNEMO suite as source code for the on-board STM32F103. The library is compatible with all the STM32 hardware platforms.
  • iNEMO ENgine_PW8 engine PRO
    The iNEMO ENgine_PW8 software pack comes with the iNEMO Engine as a precompiled library for STM32F103 microcontrollers and the device firmware upgrade tool.
  • iNEMO Engine_PAAP engine PRO - supports Android Platform sensors.
    The iNEMO Engine_PAAP software pack comes with the iNEMO Engine as a precompiled library for ARM microcontrollers and is compatible with Android starting from version 2.3.3.
    It includes complete HAL and API for algorithm setup and tuning.

  • iNEMO Engine_PI3P engine PRO - platform independent
    The iNEMO Engine_PI3P software pack comes with the iNEMO Engine as a precompiled library for STM32F103 microcontrollers and with API example code for algorithm setup and tuning.
  • iNEMO demonstration board STEVAL-MKI062V2):
  • iNEMO Inertial Modules: